MATERIAL SAFETY DATA SHEET

I. PRODUCT IDENTIFICATION

Manufacturer/Supplier:

ESPI Metals

1050 Benson Way, Ashland, OR 97520

Toll Free (800) 638-2581 * Fax (541) 488-8313

E-Mail: sales@espimetals.com

Trade Name:                    Tantalum Nitride

Chemical Family:             Nitride

Formula:                           TaN

CAS #:                               12033-62-4

II. HAZARDOUS INGREDIENTS

Hazardous Component:  Tantalum Nitride

%:                                     0-100

OSHA/PEL:                     N/E

ACGIH/TLV:                   N/E

HMIS Ratings: Health: 1      Flammability: 0       Reactivity: 0

III. PHYSICAL DATA

Boiling Point:                   N/E or N/A

Melting Point:                  3360 +50 ^oC

Specific Gravity:              16.3 g/cc

Vapor Pressure:               N/E or N/A

Solubility in H₂O:            Insoluble

% Volatiles:                      N/A

Appearance and Odor:    Black to grey powder, no odor

IV. FIRE AND EXPLOSION HAZARDS DATA

Flash Point: N/A

Autoignition Temperature: N/A

Flammable Limits: Upper: N/A  Lower: N/A

Extinguishing Media: Use carbon dioxide, dry chemical extinguishing agents, dry sand, or dry ground dolomite. Do not use water.

Special Firefighting Procedures: Firefighters must wear full face, self-contained breathing apparatus, flame and chemical resistant clothing, hats, boots and gloves. Fumes from fire are hazardous. Isolate runoff to prevent environmental pollution.

Unusual Fire and Explosion Hazards: When heated to decomposition, tantalum nitride may emit toxic fumes of ammonia gas which can form explosive mixtures with air. Contact with acids may generate flammable hydrogen gas.

V. HEALTH HAZARD INFORMATION

Effects of Exposure:

To the best of our knowledge the chemical, physical and toxicological properties of tantalum nitride have not been thoroughly investigated and reported.

Some industrial injuries from tantalum have been reported. Systemic industrial poisoning however, is apparently unknown. The details of the toxicity of nitrides as a group are unknown. (Sax, Dangerous Properties of Industrial Materials)

Acute Effects:

Inhalation: May cause irritation to the respiratory system, nose, throat and lungs.

Ingestion: May cause irritation.

Skin: May cause irritation.

Eye: May cause irritation

Chronic Effects: None known

Medical Conditions Generally Aggravated by Exposure: Pre-existing respiratory disorders.

Target Organs: None known.

Carcinogenicity: NTP: No           IARC: No          OSHA: No

EMERGENCY AND FIRST AID PROCEDURES:

INHALATION: Remove to fresh air, keep warm and quiet, give oxygen if breathing is difficult and seek medical attention if symptoms persist.

INGESTION: Give 1-2 glasses of milk or water and induce vomiting, seek medical attention. Never induce vomiting or give anything by mouth to an unconscious person.

SKIN: Remove contaminated clothing, brush material off skin, wash affected area with soap and water, seek medical attention if symptoms persist.

EYE: Immediately flush eyes, including under eyelids, with large amounts of water for at least 15 minutes. Seek medical attention if symptoms persist.

VI. REACTIVITY DATA

Stability: Stable

Conditions to Avoid: None

Incompatibility (Material to Avoid): Acids, oxidizing agents.

Hazardous Decomposition Products: Ammonia gas, hydrogen gas and oxides of nitrogen.

Hazardous Polymerization: Will not occur.

VII. SPILL OR LEAK PROCEDURES

Steps to Be Taken in Case Material Is Released or Spilled: Wear appropriate respiratory and protective equipment specified in section VIII. Isolate spill area and provide ventilation. Vacuum up spill using a high efficiency particulate absolute (HEPA) air filter and place in a closed container for proper disposal. Take care not to raise dust.

Waste Disposal: In accordance with Local, State and Federal Waste Disposal Regulations.

VIII. SPECIAL PROTECTION INFORMATION

Respiratory Protection: NIOSH approved respirator

Ventilation: Handle in an inert gas, in a controlled environment. Use local exhaust to maintain concentration of exposure at low levels. General exhaust is not recommended.

Protective Gloves: Rubber.

Eye Protection: ANSI approved safety goggles.

Other Protective Clothing or Equipment: Protective gear suitable to prevent contamination.

IX. SPECIAL PRECAUTIONS

Precautions to Be Taken in Handling and Storage: Keep container tightly closed. Store in a cool, dry, well-ventilated area. Wash thoroughly after use.

Other Precautions: Handle and store in a controlled environment and inert gas such as argon.

Work Practices: Implement engineering and work practice controls to reduce and maintain concentration of exposure at low levels. Use good housekeeping and sanitation practices. Do not use tobacco or food in work area. Wash thoroughly before eating and smoking. Do not blow dust off clothing or skin with compressed air. Maintain eyewash capable of sustained flushing, safety drench shower and hygienic facilities for washing.

DOT Regulations:

Hazard Class:                   None

The above information is believed to be correct, but does not purport to be all inclusive and shall be used only as a guide. ESPI shall not be held liable for any damage resulting from handling or from contact with the above product.

Issued by:            S. Dierks

Date:                    August 2006